Semiconductor device

Abstract

A semiconductor device, comprising: a first semiconductor layer disposed on a substrate; a second semiconductor layer disposed on the first semiconductor layer; a lower insulating film disposed on the second semiconductor layer; a p-type electroconductive oxide film disposed on the lower insulating film; an upper insulating film disposed on the oxide film; and a gate electrode disposed on the upper insulating film, wherein the lower insulating film under the gate electrode has a depressed portion.

What is claimed is:  
     
       1. A semiconductor device, comprising:
 a first semiconductor layer formed over a substrate; 
 a second semiconductor layer formed over the first semiconductor layer; 
 a source electrode and a drain electrode formed over the second semiconductor layer; 
 a lower insulating film formed over the second semiconductor layer between the source electrode and the drain electrode; 
 a recess formed in the lower insulating film; 
 a p-type electroconductive oxide film formed over the lower insulating film; 
 an upper insulating film formed over the p-type electroconductive oxide film between the source electrode and the drain electrode; 
 the upper insulating film is in contact with the source electrode and the drain electrode; and 
 a gate electrode formed on the upper insulating film, 
 wherein the recess in the lower insulating film is formed under a region where the gate electrode is formed. 
 
     
     
       2. The semiconductor device according to  claim 1 , wherein
 the p-type electroconductive oxide film is formed in the recess in the lower insulating film, and 
 the lower insulating film except the recess is in contact with the upper insulating film. 
 
     
     
       3. The semiconductor device according to  claim 1 , wherein the lower insulating film includes a first insulating film having an opening corresponding to the depressed portion and a second insulating film disposed on the opening and the first insulating film. 
     
     
       4. The semiconductor device according to  claim 1 , wherein the upper insulating film is made of an insulator containing a nitrogen component. 
     
     
       5. The semiconductor device according to  claim 4 , wherein the upper insulating film contains one selected from the group consisting of SiN, AlN, SiON, and AlON. 
     
     
       6. The semiconductor device according to  claim 1 , further comprising a source electrode and a drain electrode each in contact with the second semiconductor layer. 
     
     
       7. The semiconductor device according to  claim 1 , wherein the lower insulating film is made of a material containing one or two or more selected from the group consisting of Al 2 O 3 , SiN, SiO 2 , Hf O 2 , Ta 2 O 5 , ZrO 2 , and MgO. 
     
     
       8. The semiconductor device according to  claim 1 , wherein the oxide film is made of a material containing one or two or more selected from the group consisting of NiO, Cu 2 O, CuAlO 2 , Ga 2 O 3 , and CuGaO 2 . 
     
     
       9. The semiconductor device according to  claim 1 , further comprising a third semiconductor layer between the second semiconductor layer and the lower insulating film. 
     
     
       10. The semiconductor device according to  claim 1 , wherein the first semiconductor layer is made of a material containing GaN. 
     
     
       11. The semiconductor device according to  claim 1 , wherein the second semiconductor layer is made of a material containing AlGaN. 
     
     
       12. A method for manufacturing a semiconductor device, comprising:
 sequentially forming a first semiconductor layer and a second semiconductor layer on a substrate; 
 forming a lower insulating film having a depressed portion on the second semiconductor layer under a region for forming a gate electrode; 
 forming a p-type electroconductive oxide film on the lower insulating film; 
 forming an upper insulating film on the oxide film; and 
 forming the gate electrode on the upper insulating film. 
 
     
     
       13. The method for manufacturing semiconductor device according to  claim 12 , further comprising:
 removing the oxide film in the depressed portion of the lower insulating film after the forming the oxide film, 
 wherein the removing the oxide film is followed by the forming the upper insulating film. 
 
     
     
       14. The method for manufacturing a semiconductor device according to  claim 12 , wherein the forming the lower insulating film comprises:
 forming a first insulating film having an opening corresponding to the depressed portion, and forming a second insulating film on the opening and the first insulating film. 
 
     
     
       15. A method for manufacturing semiconductor device, comprising:
 sequentially forming a first semiconductor layer and a second semiconductor layer on a substrate; 
 forming a lower insulating film on the second semiconductor layer; 
 forming a p-type electroconductive oxide film on the lower insulating film under a region for forming a gate electrode; 
 forming an upper insulating film on the oxide film and the lower insulating film; and 
 forming the gate electrode on the upper insulating film. 
 
     
     
       16. The method for manufacturing a semiconductor device according to  claim 12 , wherein the upper insulating film is made of an insulator containing a nitrogen component. 
     
     
       17. The method for manufacturing a semiconductor device according to  claim 12 , further comprising forming a source electrode and a drain electrode each in contact with the second semiconductor layer. 
     
     
       18. A power supply, comprising:
 a semiconductor device, 
 wherein the semiconductor device includes 
 a first semiconductor layer formed over a substrate; 
 a second semiconductor layer formed over the first semiconductor layer; 
 a source electrode and a drain electrode formed over the second semiconductor layer; 
 a lower insulating film formed over the second semiconductor layer between the source electrode and the drain electrode; 
 a recess formed in the lower insulating film; 
 a p-type electroconductive oxide film formed over the lower insulating film; 
 an upper insulating film formed over the p-type electroconductive oxide film between the source electrode and the drain electrode; 
 the upper insulating film is in contact with the source electrode and the drain electrode; and 
 a gate electrode formed on the upper insulating film, 
 wherein the recess in the lower insulating film is formed under a region where the gate electrode is formed.