US9640756B2ActiveUtilityPatentIndex 51
Method for manufacturing magnetic memory
Est. expiryMar 11, 2035(~8.7 yrs left)· nominal 20-yr term from priority
H10P 74/207H01L 22/14H01L 43/12H01L 43/08H01L 43/02G11C 2029/5002G11C 11/161H10N 50/10H10N 50/01H10N 50/80
51
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Claims
Abstract
According to one embodiment, a method for manufacturing a magnetic memory is disclosed. The method includes forming a magnetoresistive element on a substrate. The method further includes measuring an electrical characteristic of the magnetoresistive element, and applying a voltage to the magnetoresistive element which the electrical characteristic is measured.
Claims
exact text as granted — not AI-modifiedWhat is claimed is:
1. A method for manufacturing a magnetic memory, the method comprising:
forming a magnetoresistive element on a substrate;
measuring an electrical characteristic of the magnetoresistive element;
determining whether the electrical characteristic of the magnetoresistive element is defective or not; and
applying a voltage to the magnetoresistive element when the electrical characteristic is determined as being defective, and not applying a voltage to the magnetoresistive element when the electrical characteristic is determined as not defective.
2. The method according to claim 1 , wherein the measuring the electrical characteristic of the magnetoresistive element is performed in a state in which the magnetoresistive element is on the substrate.
3. The method according to claim 1 , wherein the applying the voltage to the magnetoresistive element is performed in a state in which the magnetoresistive element is on the substrate.
4. The method according to claim 1 , further comprising measuring an electrical characteristic of the magnetoresistive element again, after the voltage is applied to the magnetoresistive element.
5. The method according to claim 4 , further comprising packaging a chip including the magnetoresistive element to which the voltage is applied.
6. The method according to claim 5 , further comprising measuring an electrical characteristic of the packaged chip by burn-in test.
7. The method according to claim 6 , wherein the burn-in test includes applying a voltage which is greater than or equal to 0.3 V and less than or equal to 0.4 V.
8. The method according to claim 7 , wherein an application time of the voltage which is greater than or equal to 0.3 V and less than or equal to 0.4 V is one hour or longer.
9. The method according to claim 1 , wherein the measuring the electrical characteristic of the magnetoresistive element is performed to a chip that is cut out from the substrate.
10. The method according to claim 9 , wherein the applying the voltage to the magnetoresistive element is performed to the chip.
11. The method according to claim 10 , wherein the measuring the electrical characteristic of the chip is performed by burn-in test.
12. The method according to claim 1 , wherein the applying the voltage to the magnetoresistive element is performed to a chip that is cut out from the substrate.
13. The method according to claim 12 , wherein the measuring the electrical characteristic of the chip is performed by burn-in test.
14. The method according to claim 1 , wherein the voltage is lower than a breakdown voltage of the magnetoresistive element.
15. The method according to claim 1 , wherein the voltage is higher than a write voltage of the magnetoresistive element.
16. The method according to claim 1 , wherein the voltage is greater than 0.5 V and less than 0.9 V.
17. The method according to claim 1 , wherein an application time of the voltage is 10 nanoseconds or more.
18. The method according to claim 1 , wherein the magnetoresistive element includes a first magnetic layer, a nonmagnetic layer on the first magnetic layer, and a second magnetic layer on the nonmagnetic layer.
19. The method according to claim 1 , wherein the applying the voltage to the magnetoresistive element comprises bringing the electrical characteristic determined as being defective into a normal electrical characteristic.Cited by (0)
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