Mask set, fabrication method of mask set, manufacturing method of semiconductor device, and recording medium

Abstract

According to one embodiment, there is provided a mask set including a first mask and a second mask. The first mask includes a first device pattern and a first mark pattern. The first mark pattern is used for an inspection of a position of the first device pattern on a surface of the first mask. The second mask is used to perform multiple exposure on a substrate together with the first mask. The second mask includes a second device pattern and a second mark pattern. The second mark pattern is used for an inspection of a position of the second device pattern on a surface of the second mask. The second mark pattern includes a pattern corresponding to a pattern obtained by inverting the first mark pattern.

What is claimed is: 
     
       1. A mask set, comprising:
 a first mask including a first device pattern and a first mark pattern, the first mark pattern being used for an inspection of a position of the first device pattern on a surface of the first mask, an outer contour of the first mask pattern defining a first continuous region; and 
 a second mask that is used to perform multiple exposure on a substrate together with the first mask, and includes a second device pattern and a second mark pattern, the second mark pattern being used for an inspection of a position of the second device pattern on a surface of the second mask, an outer contour of the second mark pattern defining a second continuous region equivalent to the first continuous region, the second mark pattern being obtained substantially by inverting a light shielding portion and a light transmitting portion of the first mark pattern within the first continuous region. 
 
     
     
       2. The mask set according to  claim 1 , wherein
 the first mask includes a plurality of first device patterns, 
 the first mark pattern is arranged between the plurality of first device patterns, 
 the second mask includes a plurality of second device patterns, and 
 the second mark pattern is arranged between the plurality of second device patterns. 
 
     
     
       3. The mask set according to  claim 1 , wherein
 the first mask further includes a first kerf region surrounding the first device pattern, 
 the first mark pattern is arranged more inwardly than the first kerf region, 
 the second mask further includes a second kerf region surrounding the second device pattern, and 
 the second mark pattern is arranged more inwardly than the second kerf region. 
 
     
     
       4. The mask set according to  claim 1 , wherein
 the first mask includes a plurality of first mark patterns, 
 the plurality of first mark patterns are arranged on the surface of the first mask at certain intervals, 
 the second mask includes a plurality of second mark patterns, 
 the plurality of second mark patterns are arranged on the surface of the second mask at certain intervals. 
 
     
     
       5. The mask set according to  claim 1 , wherein
 the first mark pattern includes an auxiliary pattern having a dimension equal to or larger than a resolution limit or higher, and 
 the second mark pattern includes an auxiliary pattern having a dimension equal to or larger than the resolution limit. 
 
     
     
       6. The mask set according to  claim 1 , wherein
 the light shielding portion of the second mark pattern has a dimension smaller than the light transmitting portion of the first mark pattern. 
 
     
     
       7. The mask set according to  claim 6 , wherein
 a light transmitting portion of the second mark pattern has a dimension larger than the light shielding portion of the first mark pattern. 
 
     
     
       8. The mask set according to  claim 1 , wherein
 each of the first mark pattern and the second mark pattern includes line patterns and space patterns that are alternately repeated within the outer contour, and 
 a width of the line pattern in the second mark pattern is smaller than a width of the space pattern in the first mark pattern. 
 
     
     
       9. The mask set according to  claim 8 , wherein
 a width of the space pattern in the second mark pattern is larger than a width of the line pattern in the first mark pattern. 
 
     
     
       10. The mask set according to  claim 8 , wherein
 the outer contour of the first mark pattern is equivalent to the outer contour of the second mark pattern. 
 
     
     
       11. The mask set according to  claim 10 , wherein
 each of the outer contour of the first mark pattern and the outer contour of the second mark pattern has substantially a cross shape. 
 
     
     
       12. The mask set according to  claim 10 , wherein
 each of the outer contour of the first mark pattern and the outer contour of the second mark pattern has substantially a letter X shape. 
 
     
     
       13. The mask set according to  claim 1 , wherein
 the first mark pattern is a punched pattern, and 
 the second mark pattern is a residual pattern included inside a pattern obtained by inverting the punched pattern at a plane view. 
 
     
     
       14. The mask set according to  claim 1 ,
 wherein the first mark pattern is a residual pattern, and 
 the second mark pattern is a punched pattern including therein a pattern obtained by inverting the residual pattern at a plane view. 
 
     
     
       15. A fabrication method of a mask set, comprising:
 generating data of a first mask by arranging a first device pattern and a first mark pattern, the first mark pattern being used for an inspection of a position of the first device pattern on a surface of the first mask, an outer contour of the first mask pattern defining a first continuous region; and 
 generating data of a second mask by arranging a second device pattern and a second mark pattern, the second mark pattern being used for an inspection of a position of the second device pattern on a surface of the second mask, an outer contour of the second mark pattern defining a second continuous region equivalent to the first continuous region, the second mark pattern being obtained substantially by inverting a light shielding portion and a light transmitting portion of the first mark pattern within the first continuous region, the second mask being used to perform multiple exposure on a substrate together with the first mask. 
 
     
     
       16. The fabrication method of the mask set according to  claim 15 , further comprising,
 verifying that the first mark pattern and the second mark pattern are not to be transferred onto the substrate by the multiple exposure, using the data of the first mask and the data of the second mask. 
 
     
     
       17. The fabrication method of the mask set according to  claim 15 , further comprising:
 generating the first mask using the data of the first mask; 
 generating the second mask using the data of the second mask; 
 inspecting the position of the first device pattern on the surface of the generated first mask using the first mark pattern; and 
 inspecting the position of the second device pattern on the surface of the generated second mask using the second mark pattern. 
 
     
     
       18. A manufacturing method of a semiconductor device, comprising:
 manufacturing a mask set including a first mask and a second mask by the fabrication method according to  claim 15 ; 
 performing first exposure on a substrate using the first mask; and 
 performing second exposure on the substrate using the second mask. 
 
     
     
       19. The manufacturing method of the semiconductor device according to  claim 18 , further comprising
 developing the substrate that has been subjected to the multiple exposure including the first exposure and the second exposure. 
 
     
     
       20. A nontransitory computer readable recording medium including a program recorded therein, the program causing a computer to execute:
 generating data of a first mask by arranging a first device pattern and a first mark pattern, the first mark pattern being used for an inspection of a position of the first device pattern on a mask surface, an outer contour of the first mask pattern defining a first continuous region; and 
 generating data of a second mask by arranging a second device pattern and a second mark pattern, the second mark pattern being used for an inspection of a position of the second device pattern on a surface of the second mask, an outer contour of the second mark pattern defining a second continuous region equivalent to the first continuous region, the second mark pattern being obtained substantially by inverting a light shielding portion and a light transmitting portion of the first mark pattern within the first continuous region, the second mask being used to perform multiple exposure on a substrate together with the first mask.