Annular cooling fluid passage for magnets

Abstract

A magnet having an annular coolant fluid passage is generally described. Various examples provide a magnet including a first magnet and a second magnet disposed around an ion beam coupler with an aperture there through. The first and second magnets each including a metal core having a cavity therein, one or more conductive wire wraps disposed around the metal core, and an annular core element configured to be inserted into the cavity, wherein an annular coolant fluid passage is formed between the cavity and the annular core element. Furthermore, the annular core element may have a first diameter and a middle section having a second diameter, the second diameter being less than the first diameter. Other embodiments are disclosed and claimed.

The invention claimed is: 
     
       1. An apparatus comprising:
 an ion source configured to emit an ion beam; 
 a magnet operable with the ion source, the magnet comprising: 
 a metal core having a cavity; 
 a plurality of conductive wire wraps disposed around the metal core; and 
 an annular core element configured to be received within the cavity, the annular core element further configured to form an annular coolant fluid passage between the cavity and the annular core element, wherein the annular core element has an external coolant fluid opening, an internal coolant fluid opening disposed in a middle section, and an internal coolant fluid passage connecting the external coolant fluid opening and the internal coolant fluid opening; and 
 a coolant fluid reservoir containing a coolant fluid and connected to the annular coolant fluid passage. 
 
     
     
       2. The apparatus according to  claim 1 , wherein the magnet comprises:
 a first magnet disposed adjacent to an ion beam coupler; and 
 a second magnet disposed adjacent to the ion beam coupler and the first magnet. 
 
     
     
       3. The apparatus according to  claim 1 , wherein the magnet is a quadrupole magnet. 
     
     
       4. The apparatus according to  claim 1 , wherein the annular core element has a first diameter and the middle section has a second diameter, the second diameter being less than the first diameter. 
     
     
       5. The apparatus according to  claim 1 , wherein the external coolant fluid opening is a first external coolant fluid opening and the internal coolant fluid opening is a first internal coolant fluid opening, and wherein the annular core element further includes:
 a second external coolant fluid opening; 
 a second internal coolant fluid opening disposed in the middle section; and 
 a second internal coolant fluid passage connecting the second external coolant fluid opening and the second internal coolant fluid opening. 
 
     
     
       6. The apparatus according to  claim 1 , further comprising an o-ring disposed within a circumferential recess of the annular core element, the o-ring for fluidically sealing the annular core element to the metal core. 
     
     
       7. The apparatus according to  claim 1 , further comprising a coolant fluid pump connected between the coolant fluid reservoir and the annular coolant fluid passage. 
     
     
       8. An apparatus comprising:
 a magnet operable with an ion source, the magnet comprising: 
 a metal core having a cavity; 
 a plurality of conductive wire wraps disposed around the metal core; and 
 an annular core element configured to be received within the cavity, the annular core element further configured to form an annular coolant fluid passage between the cavity and the annular core element, wherein the annular core element has an external coolant fluid opening, an internal coolant fluid opening disposed in a middle section, and an internal coolant fluid passage connecting the external coolant fluid opening and the internal coolant fluid opening; and 
 a coolant fluid reservoir containing a coolant fluid and connected to the annular coolant fluid passage. 
 
     
     
       9. The apparatus according to  claim 8 , wherein the magnet is a quadrupole magnet. 
     
     
       10. The apparatus according to  claim 8 , wherein the annular core element has a first diameter and the middle section has a second diameter, the second diameter being less than the first diameter. 
     
     
       11. The apparatus according to  claim 8 , wherein the external coolant fluid opening is
 a first external coolant fluid opening and the internal coolant fluid opening is a first internal coolant fluid opening, and wherein the annular core element further includes: 
 a second external coolant fluid opening; 
 a second internal coolant fluid opening disposed in the middle section; and 
 
       a second internal coolant fluid passage connecting the second external coolant fluid opening and the second internal coolant fluid opening. 
     
     
       12. The apparatus according to  claim 8 , further comprising an o-ring disposed within a circumferential recess of the annular core element, the o-ring for fluidically sealing the annular core element to the metal core. 
     
     
       13. The apparatus according to  claim 8 , wherein the magnet comprises:
 a first magnet disposed adjacent to an ion beam coupler; and 
 a second magnet disposed adjacent to the ion beam coupler and the first magnet. 
 
     
     
       14. The apparatus according to  claim 8 , further comprising a coolant fluid pump connected between the coolant fluid reservoir and the annular coolant fluid passage. 
     
     
       15. An ion implantation apparatus, comprising:
 an ion source; 
 a magnet positioned downstream of the ion source in a direction of travel of an ion beam emitted from the ion source, the magnet comprising:
 an ion beam coupling having an aperture; 
 a first magnet disposed adjacent to the ion beam coupling; and 
 a second magnet disposed adjacent to the ion beam coupling and the first magnet, the first and second magnets each including:
 a metal core having a cavity therein; 
 a plurality of conductive wire wraps disposed around the metal core; and 
 an annular core element configured to be received within the cavity, the annular core element configured to form an annular coolant fluid passage between the metal core and the annular core element, wherein the annular core element has an external coolant fluid opening, an internal coolant fluid opening disposed in the middle section, and an internal coolant fluid passage connecting the external coolant fluid opening and the internal coolant fluid opening; and 
 
 
 
       a coolant fluid reservoir containing a coolant fluid and connected to the annular coolant fluid passage. 
     
     
       16. The ion implantation apparatus according to  claim 15 , wherein the magnet is a quadrupole magnet. 
     
     
       17. The ion implantation apparatus according to  claim 15 , wherein the annular core element has a first diameter and the middle section has a second diameter, the second diameter being less than the first diameter. 
     
     
       18. The ion implantation apparatus according to  claim 15 , wherein the external coolant fluid opening is a first external coolant fluid opening and the internal coolant fluid opening is a first internal coolant fluid opening, and wherein the annular core element further includes:
 a second external coolant fluid opening; 
 a second internal coolant fluid opening disposed in the middle section; and 
 a second internal coolant fluid passage connecting the second external coolant fluid opening and the second internal coolant fluid opening. 
 
     
     
       19. The ion implantation apparatus according to  claim 15 , further comprising an o-ring disposed within a circumferential recess of the annular core element, the o-ring for fluidically sealing the annular core element to the metal core. 
     
     
       20. The ion implantation apparatus according to  claim 15 , further comprising a coolant fluid pump connected between the coolant fluid reservoir and the annular coolant fluid passage.