USD1009816SActiveUtility

Collimator for a physical vapor deposition chamber

72
Assignee: APPLIED MATERIALS INCPriority: Aug 29, 2021Filed: Aug 29, 2021Granted: Jan 2, 2024
Est. expiryAug 29, 2041(~15.1 yrs left)· nominal 20-yr term from priority
Inventors:Martin Lee RikerKeith A. MillerFuhong ZhangLuke Vianney VarkeyKishor KalathiparambilXiangjin Xie
72
PatentIndex Score
5
Cited by
66
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       We claim the ornamental design for a collimator for a physical vapor deposition chamber, as shown and described.

Join the waitlist — get patent alerts

Track USD1009816S — get alerts on status changes and closely related new filings.

We store only your email — no account needed. See our privacy policy.