USD1019583SActiveUtility
Inner tube of reaction tube for semiconductor manufacturing equipment
Est. expiryMay 30, 2042(~15.9 yrs left)· nominal 20-yr term from priority
Inventors:Atsushi Hirano
31
PatentIndex Score
0
Cited by
50
References
1
Claims
Claims
exact text as granted — not AI-modifiedCLAIM
I claim the ornamental design for an inner tube of reaction tube for semiconductor manufacturing equipment, as shown and described.Join the waitlist — get patent alerts
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