USD1019583SActiveUtility

Inner tube of reaction tube for semiconductor manufacturing equipment

Assignee: KOKUSAI ELECTRIC CORPPriority: May 30, 2022Filed: Nov 28, 2022Granted: Mar 26, 2024
Est. expiryMay 30, 2042(~15.9 yrs left)· nominal 20-yr term from priority
Inventors:Atsushi Hirano
31
PatentIndex Score
0
Cited by
50
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       I claim the ornamental design for an inner tube of reaction tube for semiconductor manufacturing equipment, as shown and described.

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