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Collimator for a physical vapor deposition (PVD) chamber

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Assignee: APPLIED MATERIALS INCPriority: Dec 16, 2022Filed: Dec 16, 2022Granted: Apr 23, 2024
Est. expiryDec 16, 2042(~16.4 yrs left)· nominal 20-yr term from priority
Inventors:Martin Lee RikerLuke Vianney VarkeyXiangjin Xie
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CLAIM 
     
       The ornamental design for a collimator for a physical vapor deposition (PVD) chamber, as shown and described.

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