USD1026054SActiveUtility

Collimator for a physical vapor deposition (PVD) chamber

70
Assignee: APPLIED MATERIALS INCPriority: Apr 22, 2022Filed: Apr 22, 2022Granted: May 7, 2024
Est. expiryApr 22, 2042(~15.8 yrs left)· nominal 20-yr term from priority
Inventors:Martin Lee RikerKeith A. MillerLuke Vianney VarkeyXiangjin XieKishor Kalathiparambil
70
PatentIndex Score
4
Cited by
23
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       We claim the ornamental design for a collimator for a physical vapor deposition (PVD) chamber, as shown and described.

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