USD1038901SActiveUtility

Collimator for a physical vapor deposition chamber

75
Assignee: APPLIED MATERIALS INCPriority: Jan 12, 2022Filed: Jan 12, 2022Granted: Aug 13, 2024
Est. expiryJan 12, 2042(~15.5 yrs left)· nominal 20-yr term from priority
Inventors:Fuhong ZhangMartin Lee RikerSuhas Bangalore UmeshMadan Kumar Shimoga Mylarappa
75
PatentIndex Score
5
Cited by
70
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for a collimator for a physical vapor deposition chamber, as shown and described.

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