USD1052547SActiveUtility

Semiconductor wafer and susceptor heating

82
Assignee: NUFLARE TECHNOLOGY INCPriority: Oct 20, 2022Filed: Mar 28, 2023Granted: Nov 26, 2024
Est. expiryOct 20, 2042(~16.2 yrs left)· nominal 20-yr term from priority
Inventors:Kunihiko SuzukiTakuto Umetsu
82
PatentIndex Score
7
Cited by
32
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for a semiconductor wafer and susceptor heating as shown and described.

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