USD1078667SActiveUtility

Wafer support of semiconductor manufacturing apparatus

Assignee: KOKUSAI ELECTRIC CORPPriority: Sep 14, 2022Filed: Feb 22, 2023Granted: Jun 10, 2025

Est. expirySep 14, 2042(~16.1 yrs left)· nominal 20-yr term from priority

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Claims

exact text as granted — not AI-modified

CLAIM 
     
       The ornamental design for a wafer support of semiconductor manufacturing apparatus, as shown and described.

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