USD1107670SActiveUtility

Showerhead for a substrate processing system

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Assignee: LAM RES CORPPriority: Apr 25, 2022Filed: Apr 25, 2022Granted: Dec 30, 2025
Est. expiryApr 25, 2042(~15.8 yrs left)· nominal 20-yr term from priority
Inventors:Eli JeonDaniel BoatrightPhilip H. ChenDebotosh PoddarKyle Watt HartDouglas Walter AgnewKashyap Subramanya
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PatentIndex Score
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Cited by
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References
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Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for a showerhead for a substrate processing system as shown and described.

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