Inventor · disambiguated record
Daniel Boatright
Also filed as: BOATRIGHT DANIEL · BOATRIGHT DANIEL J · BOATRIGHT DANIEL JOEL
4 granted patents·8 pending applications·0 citations·filing 2011–2023
54Inventor score
Top patents by PatentIndex Score
12 records- 0167US11717866B2Etching metal-oxide and protecting chamber componentsLAM RES CORP·Filed 2022·Granted Aug 8, 2023·0 cites·8 claims
- 0265US2025305128A1Multi-zone gas distribution for asymmetric wafer bow compensationLAM RES CORP·Filed 2023·Application pending·0 cites
- 0364US2025305129A1Multi-path helical mixer for asymmetric wafer bow compensationLAM RES CORP·Filed 2023·Application pending·0 cites
- 0453US2025118592A1Apparatuses for backside wafer processing with edge-only wafer contactLAM RES CORP·Filed 2023·Application pending·0 cites
- 0549US2025003069A1Dry process tool with adjustable flow valveLAM RES CORP·Filed 2022·Application pending·0 cites
- 0649US2021308726A1Etching metal-oxide and protecting chamber componentsLAM RES CORP·Filed 2019·Application pending·0 cites
- 0747US2025230546A1Selective control of multi-station processing chamber componentsLAM RES CORP·Filed 2022·Application pending·0 cites
- 0844US12400880B2Apparatuses for uniform fluid delivery in a multi-station semiconductor processing chamberLAM RES CORP·Filed 2022·Granted Aug 26, 2025·0 cites·24 claims
- 0944US2025179638A1Showerhead assembly and substrate processing systems for improving deposition thickness uniformityLAM RES CORP·Filed 2022·Application pending·0 cites
- 1040US8901947B2Probe out-of-position sensing for automated test equipmentELECTRO SCIENT IND INC·Filed 2012·Granted Dec 2, 2014·0 cites·20 claims
- 1132US2012249175A1Conveyor-mountable carrier for electronic device testingBOATRIGHT DANIEL J·Filed 2011·Application pending·0 cites
- 1221USD1107670SShowerhead for a substrate processing systemLAM RES CORP·Filed 2022·Granted Dec 30, 2025·0 cites·1 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →