USD1112114SActiveUtility

Thermal processing chamber for a semiconductor

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Assignee: KOKUSAI ELECTRIC CORPPriority: Feb 15, 2023Filed: Aug 2, 2023Granted: Feb 10, 2026
Est. expiryFeb 15, 2043(~16.6 yrs left)· nominal 20-yr term from priority
Inventors:YASUI TAKESHIABURATANI YUKINORI
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Cited by
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References
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Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for a thermal processing chamber for a semiconductor, as shown and described.

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