USD323332SExpiredUtility

Handling arm for boats for thermal treatment of semiconductor wafers

48
Assignee: TEL SAGAMI LTDPriority: Jul 25, 1988Filed: Jan 25, 1989Granted: Jan 21, 1992
Est. expiryJul 25, 2008(expired)· nominal 20-yr term from priority
Inventors:Katsumi IshiiMitsuo KatohShingo Watanabe
48
PatentIndex Score
5
Cited by
3
References
1
Claims

Claims

exact text as granted — not AI-modified
The ornamental design for a handling arm for boats for thermal treatment of semiconductor wafers, as shown and described.

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