USD403337SExpiredUtility

High conductance low wall deposition upper shield

Assignee: APPLIED MATERIALS INCPriority: Aug 5, 1997Filed: Aug 5, 1997Granted: Dec 29, 1998
Est. expiryAug 5, 2017(expired)· nominal 20-yr term from priority
Inventors:David T. Or
65
PatentIndex Score
13
Cited by
3
References
1
Claims

Claims

exact text as granted — not AI-modified
The ornamental design for a high conductance low wall deposition upper shield, as shown and described.

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