USD407696SExpiredUtility

Inner tube for use in a semiconductor wafer heat processing apparatus

88
Assignee: TOKYO ELECTRON LTDPriority: Aug 20, 1997Filed: Feb 2, 1998Granted: Apr 6, 1999
Est. expiryAug 20, 2017(expired)· nominal 20-yr term from priority
Inventors:Tomohisa Shimazu
88
PatentIndex Score
35
Cited by
4
References
1
Claims

Claims

exact text as granted — not AI-modified
I claim the ornamental design for inner tube for use in a semiconductor wafer heat processing apparatus, as shown and described.

Cited by (0)

No later patents cite this yet.

References (0)

No backward citations on record.