USD412513SExpiredUtility

Upper electrode for manufacturing semiconductors

Assignee: TOKYO ELECTRON LTDPriority: Jan 29, 1997Filed: Jul 28, 1997Granted: Aug 3, 1999

Est. expiryJan 29, 2017(expired)· nominal 20-yr term from priority

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exact text as granted — not AI-modified

I claim the ornamental design for an upper electrode for manufacturing semiconductors, as shown and described.

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