USD493873SExpiredUtility

Heating gas supplier for semiconductor manufacturing equipment

79
Assignee: TOKYO ELECTRON LTDPriority: May 24, 2002Filed: Nov 21, 2002Granted: Aug 3, 2004
Est. expiryMay 24, 2022(expired)· nominal 20-yr term from priority
Inventors:Daisuke Hayashi
79
PatentIndex Score
23
Cited by
3
References
1
Claims

Claims

exact text as granted — not AI-modified
I claim the ornamental design for heating gas supplier for semiconductor manufacturing equipment, as shown and described.

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