USD546784SExpiredUtility

Attracting disc for an electrostatic chuck for semiconductor production

89
Assignee: TOKYO ELECTRON LTDPriority: Sep 29, 2005Filed: Dec 19, 2005Granted: Jul 17, 2007
Est. expirySep 29, 2025(expired)· nominal 20-yr term from priority
Inventors:Daisuke Hayashi
89
PatentIndex Score
39
Cited by
18
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for an attracting disc for an electrostatic chuck for semiconductor production, as shown and described.

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