USD556157SExpiredUtility

Load-lock chamber

Assignee: TOKYO ELECTRON LTDPriority: May 28, 2004Filed: Nov 22, 2004Granted: Nov 27, 2007
Est. expiryMay 28, 2024(expired)· nominal 20-yr term from priority
56
PatentIndex Score
9
Cited by
9
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for a load-lock chamber, as shown and described.

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