USD559805SExpiredUtility

Stage arm for a semiconductor wafer delivery apparatus

54
Assignee: TOKYO ELECTRON LTDPriority: Aug 12, 2005Filed: Nov 14, 2005Granted: Jan 15, 2008
Est. expiryAug 12, 2025(expired)· nominal 20-yr term from priority
Inventors:Hiroki Hosaka
54
PatentIndex Score
9
Cited by
16
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for a stage arm for a semiconductor wafer delivery apparatus, as shown and described.

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