USD576647SActiveUtility

Nozzle for vapor-phase epitaxial equipment

38
Assignee: NUFLARE TECHNOLOGY INCPriority: Oct 6, 2006Filed: Jan 4, 2007Granted: Sep 9, 2008
Est. expiryOct 6, 2026(~0.2 yrs left)· nominal 20-yr term from priority
Inventors:Hiroshi FurutaniSeiichi NakazawaMichio Nishibayashi
38
PatentIndex Score
5
Cited by
15
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for a nozzle for vapor-phase epitaxial equipment, as shown and described.

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