USD589472SActiveUtility

Processing chamber for manufacturing semiconductors

47
Assignee: TOKYO ELECTRON LTDPriority: Oct 10, 2006Filed: Apr 10, 2007Granted: Mar 31, 2009
Est. expiryOct 10, 2026(~0.2 yrs left)· nominal 20-yr term from priority
Inventors:Yicheng Li
47
PatentIndex Score
6
Cited by
14
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for a processing chamber for manufacturing semiconductors or the like, as shown and described.

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