USD590359SExpiredUtility

Process tube for manufacturing semiconductor wafers or the like

48
Assignee: TOKYO ELECTRON LTDPriority: Feb 20, 2006Filed: Aug 18, 2006Granted: Apr 14, 2009
Est. expiryFeb 20, 2026(expired)· nominal 20-yr term from priority
Inventors:Hirofumi Kaneko
48
PatentIndex Score
7
Cited by
13
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for a process tube for manufacturing semiconductor wafers or the like, as shown and described.

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