USD593969SActiveUtility

Processing chamber for manufacturing semiconductors

Assignee: TOKYO ELECTRON LTDPriority: Oct 10, 2006Filed: Apr 10, 2007Granted: Jun 9, 2009

Est. expiryOct 10, 2026(~0.2 yrs left)· nominal 20-yr term from priority

PatentIndex Score

541

Cited by

References

Claims

exact text as granted — not AI-modified

CLAIM 
     
       The ornamental design for a processing chamber for manufacturing semiconductors or the like, as shown and described.

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