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Process tube for manufacturing semiconductor wafers

87
Assignee: TOKYO ELECTRON LTDPriority: Sep 12, 2006Filed: Mar 9, 2007Granted: Sep 22, 2009
Est. expirySep 12, 2026(~0.2 yrs left)· nominal 20-yr term from priority
Inventors:Hiroyuki MatsuuraKoichi Shimada
87
PatentIndex Score
36
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10
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for a process tub for manufacturing semiconductor wafers, as shown and described.

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