USD601521SActiveUtility

Heater for manufacturing semiconductor

82
Assignee: TOKYO ELECTRON LTDPriority: Sep 28, 2006Filed: Mar 28, 2007Granted: Oct 6, 2009
Est. expirySep 28, 2026(~0.2 yrs left)· nominal 20-yr term from priority
Inventors:Tomohito Komatsu
82
PatentIndex Score
30
Cited by
11
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for a heater for manufacturing semiconductor or the like, as shown and described.

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