USD604257SExpiredUtility

Heater for semiconductor manufacturing

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Assignee: TOKYO ELECTRON LTDPriority: Oct 27, 2005Filed: Apr 27, 2006Granted: Nov 17, 2009
Est. expiryOct 27, 2025(expired)· nominal 20-yr term from priority
Inventors:Yasuhiro InatomiKenichi YamagaHiroyuki Honma
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6
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1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for a heater for semiconductor manufacturing, as shown and described.

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