USD611013SActiveUtility

Process tube for manufacturing semiconductor wafers

86
Assignee: TOKYO ELECTRON LTDPriority: Mar 28, 2008Filed: Sep 26, 2008Granted: Mar 2, 2010
Est. expiryMar 28, 2028(~1.7 yrs left)· nominal 20-yr term from priority
Inventors:Kiyohiko Takahashi
86
PatentIndex Score
36
Cited by
13
References
1
Claims

Claims

exact text as granted — not AI-modified
The ornamental design for a process tube for manufacturing semiconductor wafers, as shown and described.

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