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Substrate transfer device for semiconductor deposition apparatus

Assignee: ASM GENITECH KOREA LTDPriority: Jul 21, 2008Filed: Jan 16, 2009Granted: Apr 20, 2010
Est. expiryJul 21, 2028(~2.1 yrs left)· nominal 20-yr term from priority
Inventors:LEE JEONG-HOJEONG SANG JINCHOI YOUNG SEOK
63
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Claims

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The ornamental design for a substrate transfer device for semiconductor deposition apparatus, as shown and described.

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