USD614152SActiveUtility

Substrate transfer device for semiconductor deposition apparatus

Assignee: ASM GENITECH KOREA LTDPriority: Jul 21, 2008Filed: Jan 16, 2009Granted: Apr 20, 2010

Est. expiryJul 21, 2028(~1.9 yrs left)· nominal 20-yr term from priority

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exact text as granted — not AI-modified

The ornamental design for a substrate transfer device for semiconductor deposition apparatus, as shown and described.

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