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Substrate support for a semiconductor deposition apparatus

98
Assignee: ASM GENITECH KOREA LTDPriority: Jul 21, 2008Filed: Jan 16, 2009Granted: Apr 27, 2010
Est. expiryJul 21, 2028(~2 yrs left)· nominal 20-yr term from priority
Inventors:Jeong Ho LeeSang Jin JeongDong Rak Jung
98
PatentIndex Score
614
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1
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Claims

exact text as granted — not AI-modified
The ornamental design for a substrate support for a semiconductor deposition apparatus, as shown and described.

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