USD616395SActiveUtility

Support of wafer boat for manufacturing semiconductor wafers

82
Assignee: TOKYO ELECTRON LTDPriority: Mar 11, 2009Filed: Sep 2, 2009Granted: May 25, 2010
Est. expiryMar 11, 2029(~2.6 yrs left)· nominal 20-yr term from priority
Inventors:Izumi Sato
82
PatentIndex Score
27
Cited by
7
References
1
Claims

Claims

exact text as granted — not AI-modified
The ornamental design for a support of wafer boat for manufacturing semiconductor wafers, as shown and described.

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