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Process tube for manufacturing semiconductor wafers

Assignee: TOKYO ELECTRON LTDPriority: May 8, 2007Filed: Nov 8, 2007Granted: Jul 13, 2010

Est. expiryMay 8, 2027(~0.8 yrs left)· nominal 20-yr term from priority

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exact text as granted — not AI-modified

The ornamental design for a process tube for manufacturing semiconductor wafers, as shown and described.

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