USD620085SActiveUtility

Gas supply pipe for manufacturing semiconductor wafers

Assignee: TOKYO ELECTRON LTDPriority: May 8, 2007Filed: Nov 8, 2007Granted: Jul 20, 2010
Est. expiryMay 8, 2027(~0.8 yrs left)· nominal 20-yr term from priority
Inventors:Mitsuhiro Okada
58
PatentIndex Score
10
Cited by
6
References
1
Claims

Claims

exact text as granted — not AI-modified
The ornamental design for a gas supply pipe for manufacturing semiconductor wafers, as shown and described.

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