USD643055SActiveUtility

Heater block for use in a semiconductor processing tool

99
Assignee: ASM JAPANPriority: Sep 11, 2008Filed: Sep 11, 2008Granted: Aug 9, 2011
Est. expirySep 11, 2028(~2.2 yrs left)· nominal 20-yr term from priority
Inventors:Satoshi Takahashi
99
PatentIndex Score
524
Cited by
12
References
1
Claims

Claims

exact text as granted — not AI-modified
I claim the ornamental design for a heater block for use in a semiconductor processing tool, as shown and described.

Cited by (0)

No later patents cite this yet.

References (0)

No backward citations on record.