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Top plate for reactor for manufacturing semiconductor

81
Assignee: HONMA MANABUPriority: Oct 21, 2010Filed: Apr 13, 2011Granted: Feb 28, 2012
Est. expiryOct 21, 2030(~4.3 yrs left)· nominal 20-yr term from priority
Inventors:Manabu HonmaKatsuyuki Hishiya
81
PatentIndex Score
28
Cited by
6
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for top plate for reactor for manufacturing semiconductor, as shown and described.

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