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Boat of wafer processing apparatus

79
Assignee: TAKEBAYASHI YUJIPriority: Jun 18, 2010Filed: Oct 28, 2010Granted: Mar 13, 2012
Est. expiryJun 18, 2030(~3.9 yrs left)· nominal 20-yr term from priority
Inventors:Yuji TakebayashiTatsuyuki SaitoTetsuo YamamotoTsutomu KatoSatoshi Okada
79
PatentIndex Score
26
Cited by
21
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for a boat of a wafer processing apparatus, as shown and described.

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