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Deposition chamber cover ring

97
Assignee: GOEL ASHISHPriority: Jan 25, 2012Filed: Jan 25, 2012Granted: Aug 14, 2012
Est. expiryJan 25, 2032(~5.5 yrs left)· nominal 20-yr term from priority
97
PatentIndex Score
118
Cited by
23
References
1
Claims

Claims

exact text as granted — not AI-modified
The ornamental design for a deposition chamber cover ring, as shown and described.

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