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Film-forming apparatus

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Assignee: ULVAC INCPriority: Aug 30, 2010Filed: Jun 4, 2013Granted: Jan 14, 2014
Est. expiryAug 30, 2030(~4.1 yrs left)· nominal 20-yr term from priority
Inventors:Shinya FujimotoNobuhiro HayashiTakayoshi HironoIsao TadaShuji Saito
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Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for film-forming apparatus, as shown and described.

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