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Electrode member for a plasma processing apparatus

88
Assignee: NAGAKUBO KEIICHIPriority: Sep 30, 2011Filed: Mar 29, 2012Granted: Feb 11, 2014
Est. expirySep 30, 2031(~5.2 yrs left)· nominal 20-yr term from priority
Inventors:Keiichi Nagakubo
88
PatentIndex Score
45
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23
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for a electrode member for a plasma processing apparatus, as shown and described.

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