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Chamber of charged particle beam drawing apparatus

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Assignee: NUFLARE TECHNOLOGY INCPriority: Jul 17, 2013Filed: Jan 16, 2014Granted: Feb 10, 2015
Est. expiryJul 17, 2033(~7 yrs left)· nominal 20-yr term from priority
Inventors:Hiroyasu SaitoSeiichi NakazawaYoshinori Nakagawa
62
PatentIndex Score
12
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22
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1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for a chamber of charged particle beam drawing apparatus, as shown and described.

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