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Roller shaft for substrate cleaning

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Assignee: EBARA CORPPriority: Feb 1, 2013Filed: Jul 18, 2013Granted: Jul 28, 2015
Est. expiryFeb 1, 2033(~6.6 yrs left)· nominal 20-yr term from priority
Inventors:Tomoatsu IshibashiHiroshi Kojima
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PatentIndex Score
7
Cited by
36
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for a roller shaft for substrate cleaning, as shown and described.

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