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Roller shaft for substrate cleaning

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Assignee: EBARA CORPPriority: Sep 24, 2013Filed: Mar 21, 2014Granted: Jul 28, 2015
Est. expirySep 24, 2033(~7.2 yrs left)· nominal 20-yr term from priority
Inventors:Mitsuru MiyazakiTakuya Inoue
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Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for a roller shaft for substrate cleaning, as shown and described.

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