USD759603SActiveUtility

Chamber of charged particle beam drawing apparatus

Assignee: NUFLARE TECHNOLOGY INCPriority: Jul 17, 2013Filed: Jan 16, 2015Granted: Jun 21, 2016

Est. expiryJul 17, 2033(~7 yrs left)· nominal 20-yr term from priority

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Claims

exact text as granted — not AI-modified

CLAIM 
     
       The ornamental design for a chamber of charged particle beam drawing apparatus, as shown and described.

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