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Target profile for a physical vapor deposition chamber target

97
Assignee: APPLIED MATERIALS INCPriority: Apr 21, 2015Filed: Apr 21, 2015Granted: Sep 12, 2017
Est. expiryApr 21, 2035(~8.8 yrs left)· nominal 20-yr term from priority
Inventors:Fuhong ZhangWilliam JohansonYu LiuAdolph Miller AllenBrij DattaKeith A. Miller
97
PatentIndex Score
355
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Claims

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CLAIM 
     
       The ornamental design for a target profile for a physical vapor deposition chamber target, as shown and described.

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