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Roller for substrate cleaning

39
Assignee: EBARA CORPPriority: Sep 24, 2015Filed: Mar 23, 2016Granted: Oct 10, 2017
Est. expirySep 24, 2035(~9.2 yrs left)· nominal 20-yr term from priority
Inventors:Tomoatsu Ishibashi
39
PatentIndex Score
2
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32
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1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for a roller for substrate cleaning, as shown and described.

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