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Wafer handling assembly

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Assignee: VEECO INSTR INCPriority: May 16, 2016Filed: May 16, 2016Granted: Nov 21, 2017
Est. expiryMay 16, 2036(~9.8 yrs left)· nominal 20-yr term from priority
Inventors:Yuliy RashkovskyBrett Stuart SnowdenMiguel Saldana
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PatentIndex Score
3
Cited by
21
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1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for a wafer handling assembly, as shown and described.

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