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Rotary tool for boat of semiconductor manufacturing apparatus

84
Assignee: HITACHI INT ELECTRIC INCPriority: Feb 10, 2016Filed: Jul 28, 2016Granted: Nov 28, 2017
Est. expiryFeb 10, 2036(~9.6 yrs left)· nominal 20-yr term from priority
Inventors:Takatomo YamaguchiTakashi Nogami
84
PatentIndex Score
25
Cited by
37
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       We claim the ornamental design for a rotary tool for boat of semiconductor manufacturing apparatus, as shown (and described).

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