USD818960SActiveUtility

Insulation unit of semiconductor manufacturing apparatus

53
Assignee: HITACHI INT ELECTRIC INCPriority: Feb 10, 2016Filed: Jul 28, 2016Granted: May 29, 2018
Est. expiryFeb 10, 2036(~9.6 yrs left)· nominal 20-yr term from priority
Inventors:Takatomo Yamaguchi
53
PatentIndex Score
6
Cited by
11
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       I claim the ornamental design for an insulation unit of semiconductor manufacturing apparatus, as shown and described.

Join the waitlist — get patent alerts

Track USD818960S — get alerts on status changes and closely related new filings.

We store only your email — no account needed. See our privacy policy.